Patent · US Active

Method of manufacturing an integrated semiconductor optical waveguiding device

US10605989B2 · kind B2 · utility

0Cited by
4References
25Claims
0Family size

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Inventors

Key dates

Filing dateMar 15, 2019
Grant dateMar 31, 2020
Priority date—
Expiry dateMar 15, 2039

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10F77/1248
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A method of manufacturing an integrated semiconductor optical waveguiding device comprising an elongated waveguide, the method comprising:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.