Vibration control system and optical equipment equipped therewith
US10607810B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 2, 2019 |
| Grant date | Mar 31, 2020 |
| Priority date | — |
| Expiry date | Jan 2, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/20264
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The vibration control system configured to control vibration of a vibration-controlled object is disclosed. The vibration control system comprises: (i) actuator units each including a piezoelectric element configured to expand and contract; (ii) a drive power source configured to supply drive voltages to the piezoelectric elements of the actuator units for causing the piezoelectric elements to expand and contract; (iii) a vibration detector configured to detect a status of vibration of the vibration-controlled object; and (iv) a vibration controller configured to control the vibration of the vibration-controlled object by controlling the voltages supplied by the drive power source to the piezoelectric elements of the actuator units based on the status of vibration detected by the vibration detector, respectively.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.