Graphene FET devices, systems, and methods of using the same for sequencing nucleic acids
US10607989B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 2, 2018 |
| Grant date | Mar 31, 2020 |
| Priority date | — |
| Expiry date | Jul 2, 2038 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC12Q1/6874
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided herein are integrated circuits for use in performing analyte measurements and methods of fabricating the same. Such arrays may be employed to detect a presence and/or concentration changes of various analyte types in chemical and/or biological processes, including DNA hybridization and/or sequencing reactions. The methods for fabricating the integrated circuits include steps of depositing an insulating layer on a semiconducting substrate, and forming trenches in the insulating dielectric layer. Conductive material may be deposited in the trenches to form electrodes, and the insulating layer may be conditioned so that the electrodes protrude above the insulating layer. A 2D material, such as graphene, may be deposited on to electrodes to form a channel between the electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.