Laser process and corresponding structures for forming contact holes of solar cells
US10608126B2 · kind B2 · utility
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3References
12Claims
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Key dates
| Filing date | Oct 26, 2017 |
| Grant date | Mar 31, 2020 |
| Priority date | — |
| Expiry date | Mar 13, 2038 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
Abstract
Contact holes of solar cells are formed by laser ablation to accommodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thicknesses.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.