Patent · US Active

Vibration sensor with integrated temperature detection

US10608160B2 · kind B2 · utility

1Cited by

2References

12Claims

0Family size

Assignee

VEGA Grieshaber KG · DE

Inventors

Dominik Fehrenbach · Rottweil, DE
Volker Allgaier · Lenzkirch, DE

Key dates

Filing date	Oct 18, 2017
Grant date	Mar 31, 2020
Priority date	—
Expiry date	Apr 27, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH10N30/302
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A vibration sensor with a diaphragm that can be set into vibration, a piezo-electric drive for setting the diaphragm into vibration and for detecting vibrations in the diaphragm, with the drive having at least two serial mechanical piezo elements, a temperature sensor, with at least a first piezo element made from a first piezo-electric material and at least a second piezo element made from a second piezo-electric material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.