Three axis linear actuator
US10608519B2 · kind B2 · utility
0Cited by
7References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 13, 2017 |
| Grant date | Mar 31, 2020 |
| Priority date | — |
| Expiry date | Sep 18, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K2201/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A linear motor for use in semiconductor processing apparatuses. The linear motor is a three axis linear motor that includes magnets that cover end turns of coil windings in order to utilize the end turns to generate a force along a second or third axis. The coil windings are positioned between two magnet arrays and each magnet array has a magnet, such as a voice coil motor (VCM) magnet, positioned along one side to cover the endturns and provide a magnetic flux. A VCM back iron is positioned to provide a magnetic flux return path for the VCM magnets. The structure in conjunction with a DC offset produces a useful force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.