Patent · US Active

Polycrystalline dielectric thin film and capacitor element

US10611693B2 · kind B2 · utility

0Cited by
1References
8Claims
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Key dates

Filing dateFeb 1, 2017
Grant dateApr 7, 2020
Priority date
Expiry dateFeb 1, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D1/692
  • WIPO fieldMaterials, metallurgy
  • WIPO sectorChemistry

Abstract

A polycrystalline dielectric thin film and capacitor element has a small dielectric loss tan δ. The polycrystalline dielectric thin film, in which the main composition is a perovskite oxynitride. The perovskite oxynitride is expressed by the compositional formula AaBbOoNn (a+b+o+n=5), where a/b>1 and n≥0.7.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.