Patent · US Active

MEMS anti-phase vibratory gyroscope

US10612926B2 · kind B2 · utility

0Cited by

3References

9Claims

0Family size

Assignee

Institute of Geology and Geophysics, Chinese Academy of Sciences · CN

Inventors

Lian Yu · Beijing, CN
Chen Sun · Beijing, CN

Key dates

Filing date	Feb 27, 2017
Grant date	Apr 7, 2020
Priority date	—
Expiry date	May 3, 2037

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/0118
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A MEMS anti-phase vibratory gyroscope includes two measurement masses with a top cap and a bottom cap each coupled with a respective measurement mass. The measurement masses are oppositely coupled with each other in the vertical direction. Each measurement mass includes an outer frame, an inner frame located within the outer frame, and a mass located within the inner frame. The two measurement masses are coupled with each other through the outer frame. The inner frame is coupled with the outer frame by a plurality of first elastic beams. The mass is coupled with the inner frame by a plurality of second elastic beams. A comb coupling structure is provided along opposite sides of the outer frame and the inner frame. The two masses vibrate toward the opposite direction, and the comb coupling structure measures the angular velocity of rotation.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.