Apparatus for predicting yield of semiconductor integrated circuit and method for manufacturing semiconductor device using the same
US10614186B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 21, 2018 |
| Grant date | Apr 7, 2020 |
| Priority date | — |
| Expiry date | Apr 16, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D62/292
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A yield prediction apparatus is provided. The yield prediction apparatus may include at least one processor coupled to at least one non-transitory computer-readable medium. The at least one processor may be configured to receive a first variable associated with operating characteristics of a semiconductor device, perform a simulation for the operating characteristics of the semiconductor device, perform a neural network regression analysis using a result of the simulation to determine a first function for the first variable, and predict a yield of the semiconductor integrated circuit based on an advanced Monte Carlo simulation. An input of the advanced Monte Carlo simulation may include the determined first function.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.