Apparatus for exhaust gas abatement under reduced pressure
US10617997B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 2, 2018 |
| Grant date | Apr 14, 2020 |
| Priority date | — |
| Expiry date | May 2, 2038 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4412
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus for exhaust gas abatement under reduced pressure includes a reaction tube having, in an interior thereof, an exhaust gas treatment space in which an exhaust gas supplied from an exhaust gas source via a vacuum pump is heated by an electric heater or excited by a plasma for decomposition and/or reaction treatment. The apparatus also includes a downstream vacuum pump connected to an exhaust gas outlet located downstream of the reaction tube to reduce a pressure in a region located downstream of an outlet of the vacuum pump and including the interior of the reaction tube. The downstream vacuum pump is a water-sealed pump. The apparatus further includes a water-washing unit for washing a downstream end of an exhaust gas flow path in the reaction tube with washing water. The washing water supplied by the water-washing unit is reused as seal water for the downstream vacuum pump.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.