Patent · US Active

Bias control for capacitive micromachined ultrasonic transducers

US10618078B2 · kind B2 · utility

2Cited by
45References
29Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 18, 2016
Grant dateApr 14, 2020
Priority date—
Expiry dateOct 19, 2037

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01S15/8927
  • WIPO fieldChemical engineering
  • WIPO sectorChemistry

Abstract

In some examples, a CMUT may include a plurality of electrodes, and each electrode may include a plurality of sub-electrodes. For instance, a first sub-electrode and a second sub-electrode may be disposed on opposite sides of a third sub-electrode. In some cases, a first bias voltage may be applied to the third sub-electrode and a second bias voltage may be applied to the first and second sub-electrodes while causing at least one of the first sub-electrode, the second sub-electrode, or the third sub-electrode to transmit and/or receive ultrasonic energy. For example, the second bias voltage may be applied at a different voltage amount than the first bias voltage, and/or may be applied at a different timing than the first bias voltage.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.