Tungsten precursor
US10618925B2 · kind B2 · utility
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1References
11Claims
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Key dates
| Filing date | Mar 16, 2016 |
| Grant date | Apr 14, 2020 |
| Priority date | — |
| Expiry date | Apr 21, 2036 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45553
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Provided are a tungsten precursor compound to which a substituent is bonded so as to obtain thermal stability and a method of forming a tungsten-containing film using the precursor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.