Low-[HF] room temperature wet chemical growth (RTWCG) chemical formulation
US10619097B2 · kind B2 · utility
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23References
14Claims
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Key dates
| Filing date | Jun 30, 2015 |
| Grant date | Apr 14, 2020 |
| Priority date | — |
| Expiry date | Jun 30, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/50
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
This present invention relates to a Room Temperature Wet Chemical Growth (RTWCG) formulations, methods and processes. In one embodiment, the present invention further relates to RTWCG formulations, methods and processes that utilize a low-[HF]. In another embodiment, the present invention relates to RTWCG formulations with improved bath life.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.