Capacitive pressure sensor
US10620072B2 · kind B2 · utility
1Cited by
0References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 14, 2018 |
| Grant date | Apr 14, 2020 |
| Priority date | — |
| Expiry date | Aug 20, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G2005/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A base plate has pressure introducing holes at positions facing a diaphragm support portion. A thickness portion (thick portion) of the diaphragm support portion and a sensor base joined to the diaphragm support portion thus serves as a heat dissipating or absorbing portion and hinders the transfer of thermal energy of a measured medium to a sensor diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.