Apparatus and method for handling wafer carrier doors
US10622236B2 · kind B2 · utility
265Cited by
7References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 30, 2018 |
| Grant date | Apr 14, 2020 |
| Priority date | — |
| Expiry date | Jan 30, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/683
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus for handling wafer carriers in a semiconductor fabrication facility (FAB) is disclosed. In one example, the apparatus includes: a table configured to receive a wafer carrier having a first door and operable to hold a plurality of wafers; an opening mechanism configured to open the first door of the wafer carrier; and a door storage space configured to store the first door. The apparatus may be either located on a floor of the FAB or physically coupled to a ceiling of the FAB.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.