Combined ambient pressure and acoustic MEMS sensor
US10623867B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 14, 2018 |
| Grant date | Apr 14, 2020 |
| Priority date | — |
| Expiry date | Mar 14, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2201/003
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A microelectromechanical system (MEMS) ambient pressure and acoustic sensor including an enclosure having an enclosure wall that defines an interior chamber and an acoustic input opening to the interior chamber, a moving structure positioned within the interior chamber and being acoustically coupled to the acoustic input opening. The moving structure having an acoustic sensing portion that is movable in response to an acoustic pressure input and an ambient pressure sensing portion that is movable in response to an ambient pressure input. The sensor further including a circuit electrically coupled to the moving structure and that is operable to determine an acoustic output and an ambient pressure output based on a movement of the moving structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.