Patent · US Active

Plasma generator and method for setting an ION ratio

US10624197B2 · kind B2 · utility

5Cited by

6References

9Claims

0Family size

Assignee

EPCOS AG · DE

Inventors

Michael Weilguni · Hagenberg, AT
Markus Puff · Graz, AT

Key dates

Filing date	Jul 28, 2016
Grant date	Apr 14, 2020
Priority date	—
Expiry date	Jul 28, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH05H1/2481
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

A plasma generator and a method for setting an ion ratio. In an embodiment a plasma generator includes a piezoelectric transformer suitable for ionizing a process gas, an ion separation electrode and a drive circuit suitable for applying a potential to the ion separation electrode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.