Method and apparatus for detecting cylinder and cylindrical converging lens
US10627222B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 9, 2017 |
| Grant date | Apr 21, 2020 |
| Priority date | — |
| Expiry date | May 9, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M11/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and an apparatus for detecting a cylinder and a cylindrical converging lens are disclosed. In particular, a method for non-contact interference detection of a cylindrical shape is disclosed. Two converging lenses which modulate parallel light into cylindrical waves are combined with a to-be-tested cylinder respectively. Wavefront error data of the combination of the converging lens and the to-be-tested cylinder and wavefront error data of the combination of the two cylindrical converging lenses are obtained. Shape error data of the to-be-tested cylinder, the two cylindrical converging lenses is obtained respectively by using a difference algorithm and a wavefront recovery algorithm. In the technical solution, a detection light path is simple, and shape detection of a cylinder with relatively high precision can be implemented without using a high-precision detection tool calibrated in advance. The technical solution is particularly suitable for cylinder processing in the field of optical processing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.