Patent · US Active

Unidirectional ESD protection with buried breakdown thyristor device

US10629715B2 · kind B2 · utility

1Cited by
6References
20Claims
0Family size

Assignee

Inventor

Key dates

Filing dateAug 31, 2018
Grant dateApr 21, 2020
Priority date
Expiry dateAug 31, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D86/201
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An electrostatic discharge protection device includes a substrate, first and second emitter regions disposed in the substrate, laterally spaced from one another on a side of the substrate, and having opposite conductivity types, and first and second base regions having opposite conductivity types and in which the first and second emitter regions are disposed in a thyristor arrangement, respectively. The first base region includes a buried doped layer that extends under the second base region. Each of the buried doped layer and the second base region includes a respective non-uniformity in dopant concentration profile. A spacing between the buried doped layer and the second base region at the respective non-uniformities establishes a breakdown trigger voltage for the thyristor arrangement.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.