Evaporation equipment
US10629853B2 · kind B2 · utility
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1References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 22, 2017 |
| Grant date | Apr 21, 2020 |
| Priority date | — |
| Expiry date | Jan 30, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K59/1201
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An evaporation equipment includes a main chamber and at least one sub-chamber in communication with the main chamber by a valve. The sub-chamber includes a suction plate, a suction tube, and a fixing part. The suction tube passes through the fixing part and the suction plate. When the evaporation equipment evaporates a material on a depositing substrate, the suction tube adsorbs the depositing substrate to the suction plate, the depositing substrate is aligned with a mask plate, and the depositing substrate is fixed to the mask plate by the fixing part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.