Pressure-measuring device with improved reliability and associated calibration method
US10634569B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 3, 2016 |
| Grant date | Apr 28, 2020 |
| Priority date | — |
| Expiry date | Aug 12, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L27/007
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure measurement device comprising a pressure sensor of a first type and a pressure sensor of a second type different from the first, which sensors are mounted on a common support in order to be subjected to the same pressure, in which the pressure sensor of the first type is of the capacitive type, the device being characterized in that the pressure sensor of the first type comprises at least one membrane and a first internal channel passing through the common support, a second internal channel bringing a fluid to the membrane being in fluid flow connection with the first internal channel. A calibration method associated with the device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.