Patent · US Active

Automatic bonding force calibration

US10634572B2 · kind B2 · utility

0Cited by
1References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 14, 2016
Grant dateApr 28, 2020
Priority date
Expiry dateDec 4, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2224/783
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

A calibration method for a bonder. Characteristics of a force actuator of the bonder are measured and stored in such a way that the force actuator can be controlled optimally during production operation of the bonder on the basis of the measured data. Further, a device for fully automatic or partially automatic bonding force calibration.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.