Multi-axis accelerometers with reduced cross-axis sensitivity
US10634696B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2017 |
| Grant date | Apr 28, 2020 |
| Priority date | — |
| Expiry date | Jul 16, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0848
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A multi-axis accelerometer may include a proof mass, a first electrode set, and a second electrode set. The first electrode set may detect acceleration along a second axis of the accelerometer, and may include a first electrode (C1) and a second electrode (C2). The second electrode set may detect acceleration along a first axis of the accelerometer that is orthogonal to the second axis, and may include a third electrode (C3) and a fourth electrode (C4). Application of a force along only the second axis may result in the exhibition of a non-zero change in differential capacitance between at least C1 and C2, but a zero net change in the differential capacitance between at least C3 and C4. As such, the accelerometer may exhibit little or no cross axis sensitivity in response to the applied force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.