Low-profile dual-axis deflection device having deflection axes intersecting at mirror surface and method for achieving dual-axila deflection
US10634871B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 13, 2019 |
| Grant date | Apr 28, 2020 |
| Priority date | — |
| Expiry date | May 13, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0858
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A low-profile dual-axial deflection device having deflection axes intersecting at a mirror surface and method for achieving dual-axis deflection are disclosed, the device including essentially three parts: a base and a fixing support for fixing and mounting; elastic kite-shaped seats and deflection support base providing deflection driving, and a mirror carrier, a mirror and flexible hinges and connecting stations for limiting deflection displacement of the mirror carrier. The present disclosure uses four piezoelectric ceramics to realize the output control of the deflection angle, and has high control precision and fast response. Simultaneous driving of four piezoelectric ceramics can realize dual-axis deflection of the mirror. The device adopts a sinking mirror structure, and the deflection axes intersect at the surface of the mirror, thereby reducing the optical path control error caused by the longitudinal displacement of the mirror during deflection. The structure is compact and can be installed in limited space.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.