Manufacturing method of black photo spacer array substrate and black photo spacer array substrate
US10634958B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 7, 2018 |
| Grant date | Apr 28, 2020 |
| Priority date | — |
| Expiry date | Dec 21, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/1368
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Provided is a manufacturing method of a black photo spacer array substrate. In a manufacturing method of a black photo spacer array substrate, a double layer color resist structure formed with a first color resist layer and a second color resist layer is used to pad a main pad part and a sub pad part of a main photo spacer and a sub photo spacer. Then, a thickness of the main photo spacer and a thickness of the sub photo spacer are decreased to reduce the usage amount of black photo spacer material of forming the main photo spacer and the sub photo spacer to reduce the production cost. A height difference of the main photo spacer and the sub photo spacer can be achieved by decreasing a thickness of the first color resist layer under the sub pad part with a half exposure process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.