Apparatus and method of directly patterning high resolution active matrix organic light emitting diodes using high-resolution shadow mask

US10636969B2 · kind B2 · utility

Assignee

• eMagin Corporation · US

Inventors

• Evan P. DONOGHUE · Hopewell Junction, US
• Kerry TICE · Hopewell Junction, US
• Ilyas I. KHAYRULLIN · Hopewell Junction, US
• Fridrich Vazan · Pittsford, US
• Tariq Ali · Hopewell Junction, US
• Laurie SZIKLAS · Hopewell Junction, US
• Amalkumar P. Ghosh · Hopewell Junction, US

Key dates

• Filing date: May 1, 2018
• Grant date: Apr 28, 2020
• Expiry date: May 1, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10K59/38

Abstract

An apparatus and method for performing material deposition on an active-matrix organic light emitting diode (AMOLED) display array on a substrate, includes aligning a shadow mask to a first position relative to the substrate; initially depositing a first material through the shadow mask onto the substrate at a first material deposition position relative to the first position of the aligned shadow mask and at a first deposition height; incrementing the position the shadow mask to a second position relative to the first material deposition position; and subsequently depositing one of the first material or a second material through the shadow mask onto the substrate at a second material deposition position relative to the first material deposition position, wherein the second material deposition position having an identical deposition pattern as the first material deposition position on account of the shadow mask.