Extending the range of spectrally controlled interferometry by superposition of multiple spectral modulations
US10641599B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 8, 2017 |
| Grant date | May 5, 2020 |
| Priority date | — |
| Expiry date | Jan 13, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B9/0209
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The range of measurement in spectrally controlled interferometry (SCI) is extended by superimposing multiple modulations on the low-coherence light used for the measurement. Optimally, a spectrally controllable light source modulated sinusoidally with low spectral frequency is combined with a delay line, such as provided by a Michelson interferometer. The resulting light is injected into a Fizeau interferometer to generate localized fringes at a distance corresponding to the effect of the spectrally modulated source combined with the optical path difference produced by the delay line. The combination provides a convenient way to practice SCI with all its advantages and with a range that can be extended to the degree required for any practically foreseeable application.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.