Patent · US Active

Active mechanical-environmental-thermal MEMS device for nanoscale characterization

US10641733B2 · kind B2 · utility

0Cited by

7References

12Claims

0Family size

Assignee

National Technology & Engineering Solutions of Sandia, LLC · US

Inventors

Katherine L. Jungjohann · Sandia Park, US
William Mook · Albuquerque, US
Claire Chisholm · Albuquerque, US
Michael Shaw · Tijeras, US
Khalid Mikhiel Hattar · Albuquerque, US
Paul C. Galambos · Seattle, US
Andrew Jay Leenheer · Albuquerque, US
Sean J. Hearne · Kildare, IE

Key dates

Filing date	Mar 19, 2018
Grant date	May 5, 2020
Priority date	—
Expiry date	Dec 15, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG01N2203/0286
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A microelectromechanical system (MEMS) device can be used for quantitative mechanical testing of materials within a controlled (chemical and temperature) environment, with the ability for electrochemical control to the specimen, that is coupled with a complimentary in-situ characterization technique.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.