Optical thin film, optical element, optical system, and method for producing optical thin film
US10641927B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 24, 2019 |
| Grant date | May 5, 2020 |
| Priority date | — |
| Expiry date | Sep 24, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B15/20
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical thin film formed by laminating, from the substrate side, an interlayer, a silver-containing metal layer that contains silver, and a dielectric layer, in which an anchor metal diffusion control layer provided between the interlayer and the silver-containing metal layer, an anchor region which includes an oxide of the anchor metal and has a surface energy that is less than the surface energy of the silver-containing metal layer and larger than the surface energy of the anchor metal diffusion control layer is provided between the anchor metal diffusion control layer and the silver-containing metal layer, a cap region which includes an oxide of the anchor metal is provided between the silver-containing metal layer and the dielectric layer, and the total film thickness of the silver-containing metal layer, the anchor region, and the cap region is 6 nm or less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.