Method for controlling position of a linear MEMS mirror with variable resolution and/or light intensity
US10642025B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 29, 2016 |
| Grant date | May 5, 2020 |
| Priority date | — |
| Expiry date | Feb 25, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03B21/008
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The method for controlling an angular position of a MEMS mirror, includes: applying a first driving moment to the MEMS mirror to generate a rotational scanning movement of the mirror; and, at a zooming instant, applying a second driving moment to the MEMS mirror, wherein the second driving moment is equal to the first driving moment plus an extra moment. The extra moment may be a DC offset. After a transient period of time from zooming instant, a third driving moment M2=k{dot over (θ)}2t is applied. The first and third driving moment are variable linearly with time. The driving moments are applied to torsional springs of the mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.