Lateral MOSCAP phase adjuster
US10642077B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 20, 2018 |
| Grant date | May 5, 2020 |
| Priority date | — |
| Expiry date | Nov 20, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/308
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A MOSCAP phase adjuster includes two conductive regions with a thin insulating region therebetween, where charge is accumulated or depleted. In conventional MOSCAP modulators, the conductive and insulating regions are superposed layers, extending horizontally parallel to the substrate, which limits waveguide design and mode confinement, resulting in reduced phase shift performance. An improved MOSCAP phase adjuster and method of fabricating a MOSCAP phase adjuster includes depositing the material for the second conductive region beside and over top of the first conductive region after oxidation, and selectively etching the material to form the second conductive region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.