Organometallic solution based high resolution patterning compositions and corresponding methods
US10642153B2 · kind B2 · utility
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43References
21Claims
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Key dates
| Filing date | Oct 22, 2015 |
| Grant date | May 5, 2020 |
| Priority date | — |
| Expiry date | Apr 8, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/325
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Organometallic radiation resist compositions are described based on tin ions with alkyl ligands. Some of the compositions have branched alkyl ligands to provide for improved patterning contrast while maintaining a high degree of solution stability. Blends of compounds with distinct alkyl ligands can provide further improvement in the patterning. High resolution patterning with a half-pitch of no more than 25 nm can be achieved with a line width roughness of no more than about 4.5 nm. Synthesis techniques have been developed that allow for the formation of alkyl tin oxide hydroxide compositions with very low metal contamination.
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