Transfer head for transferring micro element and transferring method of micro element
US10643879B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 1, 2018 |
| Grant date | May 5, 2020 |
| Priority date | — |
| Expiry date | Jan 1, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/80
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A transfer head for transferring micro element includes a cavity; a plurality of vacuum paths connected with the cavity respectively with valves configured at the connection between the cavity and the vacuum paths and used for opening/closing; a plurality of suction nozzles connected with the vacuum paths, wherein the suction nozzles hold or release the micro element via vacuum pressure; vacuum pressure is transmitted by each vacuum path; a switching component for controlling valve to open/close each vacuum path, so as to control the suction nozzles to hold or release required micro element via vacuum pressure. Further, the switching component includes a CMOS memory circuit and an address electrode array connected to the CMOS memory circuit to realize micro-switch array. The transfer head can selectively transfer a plurality of micro elements at one time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.