Surface treatment method of glass substrate having pit on surface thereof, production method of array substrate, and array substrate
US10644033B2 · kind B2 · utility
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Key dates
| Filing date | Sep 12, 2018 |
| Grant date | May 5, 2020 |
| Priority date | — |
| Expiry date | Sep 12, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/411
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
There is provided a surface treatment method of a glass substrate having a pit on a surface thereof, a production method of an array substrate comprising this method, and an array substrate. The method includes: forming a layer of SiO2 sol at least at a side wall of the pit; and drying the layer of SiO2 sol to form a smoothening layer so as to smoothen an upper edge and a lower edge of the side wall of the pit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.