Rotation rate sensor with multiple evaluation during operation at several frequencies

US10648810B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Burkhard Kuhlmann · Reutlingen, DE
• Thorsten Balslink · Kirchentellinsfurt, DE

Key dates

• Filing date: May 24, 2016
• Grant date: May 12, 2020
• Expiry date: Sep 7, 2036

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5747
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A rotation rate sensor includes first, second, third and fourth structures that are each movable relative to a substrate, a drive device configured to deflect each of the first, second, third, and fourth structures essentially parallel to a drive direction and out of respective resting positions of the first, second, third, and fourth structures, such that, at a first frequency, the first and fourth structures are excitable to an oscillation that is essentially in-phase relative to each other and essentially in phase-opposition relative to the second and third structures, and, at a second frequency, the first and second structures are excitable to an oscillation that is essentially in-phase relative to each other and essentially in phase-opposition relative to the third and fourth structures.