Coupled multiscale positioning of arrays of parallel, independently actuated and simultaneously driven modular scanning probe microscopes for high-throughput, in-line, nanoscale measurement of flexible, large area, and roll-to-roll processes

US10649003B2 · kind B2 · utility

Assignee

• The Board of Regents of the University of Texas System · US

Inventors

• Michael Cullinan · Austin, US
• Liam Glazer Connolly · Austin, US

Key dates

• Filing date: May 31, 2018
• Grant date: May 12, 2020
• Expiry date: May 31, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q60/34
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Disclosed herein are devices, systems and methods for in-line, nanoscale metrology. One system comprises monolithic flexure mechanisms with integrated actuators that allow movement and positioning in two axes, with an extremely high degree of accuracy, of a structure comprising one or more scanning probes. This structure is suspended to prevent any destructive interference from a sample, which can be stationary or moving at a nonzero rate, and rigid or flexible in mechanical behavior. This system can be activated at startup and quickly actuate the structure to approach the surface of the sample. Once the system achieves the desired proximity between the one or more probes and the sample, the system maintains that position of the structure to a high degree of accuracy regardless of any disturbances. This array can be moved at varying speeds laterally to match the velocity of any continually moving substrates, thus enabling scanning of moving substrates.