Metal mirror based multispectral filter array
US10651216B2 · kind B2 · utility
7Cited by
50References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 15, 2018 |
| Grant date | May 12, 2020 |
| Priority date | — |
| Expiry date | Mar 15, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2003/2826
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device may include a multispectral filter array disposed on the substrate. The multi spectral filter array may include a first metal mirror disposed on the substrate. The multi spectral filter may include a spacer disposed on the first metal mirror. The spacer may include a set of layers. The spacer may include a second metal mirror disposed on the spacer. The second metal mirror may be aligned with two or more sensor elements of a set of sensor elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.