Metal-oxide-metal capacitor with improved alignment and reduced capacitance variance

US10651268B2 · kind B2 · utility

Assignee

• QUALCOMM Incorporated · US

Inventors

• Haitao Cheng · San Diego, US
• Ye Lu · San Diego, US
• Chao Song · Beijing, CN

Key dates

• Filing date: Jun 15, 2018
• Grant date: May 12, 2020
• Expiry date: Jun 15, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D1/714

Abstract

A capacitor has reduced misalignment in the interconnect layers and lower capacitance variance. The capacitor includes a first endcap having a first section and a second section orthogonal to the first section. The capacitor includes a first set of conductive fingers orthogonally coupled to the first section. The capacitor includes a third set of conductive fingers orthogonally coupled to the second section of the endcap and a second endcap parallel to the first section of the endcap. The capacitor includes a second set of conductive fingers orthogonally coupled to a second endcap and interdigitated with the first set of conductive fingers at a first interconnect layer. The capacitor includes a third endcap parallel to the second section of the first endcap and a fourth set of conductive fingers orthogonally coupled to the third endcap and interdigitated with the third set of conductive fingers at the first interconnect layer.