Glassy carbon roll-type mold manufacturing method for fine pattern formation, and glassy carbon roll-type mold manufactured by the method
US10654083B2 · kind B2 · utility
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Key dates
| Filing date | Feb 2, 2018 |
| Grant date | May 19, 2020 |
| Priority date | — |
| Expiry date | Jul 15, 2038 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C19/00
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Provided is a glassy carbon roll-type mold manufacturing method for fine pattern formation. The method is for manufacturing a glassy carbon roll-type mold configured to form a fine pattern having a micro-nano structure on a substrate including glass or a metal. The method includes: preparing a roll precursor including a thermosetting resin material, the roll precursor having a roll shape with a circumferential surface on which a pattern corresponding to the fine pattern is formed, the roll precursor being configured to press the substrate while rotating on the substrate; and carbonizing the roll precursor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.