Rotational speed sensor with minimized interference movements in the driving mode

US10655965B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Benjamin Schmidt · Stuttgart, DE
• Andreas Lassl · Ditzingen, DE
• Burkhard Kuhlmann · Reutlingen, DE
• Christian Hoeppner · Munich, DE
• Mirko Hattass · Stuttgart, DE
• Thorsten Balslink · Kirchentellinsfurt, DE

Key dates

• Filing date: May 24, 2016
• Grant date: May 19, 2020
• Expiry date: Apr 16, 2037

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2201/0228
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A rotation rate sensor having a first structure movable with respect to the substrate, a second structure movable with respect to the substrate and with respect to the first structure, a first drive structure for deflecting the first structure with a motion component parallel to a first axis, and a second drive structure for deflecting the second structure with a motion component parallel to the first axis. The first and second structures are excitable to oscillate in counter-phase, with motion components parallel to the first axis, the first drive structure having a first spring mounted on the substrate to counteract a pivoting of the first structure around an axis parallel to a second axis extending perpendicularly to a principal extension plane, the second drive structure having a second spring mounted on the substrate to counteracts a pivoting of the second structure around a further axis parallel to the second axis.