Optical element

US10656307B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Ulrike Schulz · Jena, DE
• Friedrich Rickelt · Jena, DE
• Peter Munzert · Jena, DE
• Norbert Kaiser · Markt Taschendorf, DE

Key dates

• Filing date: Feb 21, 2019
• Grant date: May 19, 2020
• Expiry date: Feb 21, 2039

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/32136
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical element is disclosed. In an embodiment an optical element includes a substrate having a silicone surface, an antireflection layer overlying the silicone surface, wherein the antireflection layer comprises a first organic layer having a reflection-reducing nanostructure, the nanostructure having a depth of at least 30 nm, and a cover layer overlying the first organic layer, the cover layer having a thickness of no more than 40 nm.