Superconducting integrated circuit

US10658424B2 · kind B2 · utility

Assignee

• Massachusetts Institute of Technology · US

Inventors

• William D. Oliver · Arlington, US
• Rabindra N. Das · Lexington, US
• David J. Hover · Brunswick, US
• Danna Rosenberg · Arlington, US
• Xhovalin Miloshi · Needham, US
• Vladimir Bolkhovsky · Framingham, US
• Jonilyn L. Yoder · Billerica, US
• Corey W. Stull · Leominster, US
• Mark A. Gouker · Belmont, US

Key dates

• Filing date: Jul 21, 2016
• Grant date: May 19, 2020
• Expiry date: Oct 7, 2036

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N60/815
• WIPO field: Telecommunications
• WIPO sector: Electrical engineering

Abstract

A superconducting integrated circuit includes at least one superconducting resonator, including a substrate, a conductive layer disposed over a surface of the substrate with the conductive layer including at least one conductive material including a substantially low stress polycrystalline Titanium Nitride (TiN) material having an internal stress less than about two hundred fifty MPa (magnitude) such that the at least one superconducting resonator and/or qubit (hereafter called “device”) is provided as a substantially high quality factor, low loss superconducting device.