Piezoelectric film transfer for acoustic resonators and filters
US10658998B2 · kind B2 · utility
0Cited by
19References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 29, 2014 |
| Grant date | May 19, 2020 |
| Priority date | — |
| Expiry date | Aug 28, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A method for forming an acoustic resonator comprising: forming a piezoelectric material on a first substrate; and applying the piezoelectric material to a second substrate on which the acoustic resonator is fabricated upon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.