Method and apparatus for detecting concave cylinder and cylindrical diverging lens
US10663289B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 9, 2017 |
| Grant date | May 26, 2020 |
| Priority date | — |
| Expiry date | May 9, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B17/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and an apparatus for detecting a concave cylinder and a cylindrical diverging lens are disclosed. In particular, a method for non-contact interference detection of a cylindrical shape is disclosed. A cylindrical converging lens and a cylindrical diverging lens are combined with a to-be-tested concave cylinder respectively. Wavefront error data of the combination of the cylindrical diverging lens and the to-be-tested concave cylinder and wavefront error data of the combination of the cylindrical converging lens and the to-be-tested concave cylinder are obtained through interference measurement respectively. Wavefront error data of a combination of the cylindrical diverging lens and the cylindrical converging lens is then obtained through interference measurement. Shape error data of the to-be-tested concave cylinder, the cylindrical diverging lens, and the cylindrical converging lens is obtained respectively by using a difference algorithm and a wavefront recovery algorithm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.