Scanning microscope
US10663707B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 21, 2015 |
| Grant date | May 26, 2020 |
| Priority date | — |
| Expiry date | Jan 27, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/367
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A scanning microscope includes an objective and a scanning element that is adjustable for a time-variable deflection to guide a focused illumination beam across the sample in a scanning movement. A detection beam is guided across sensor elements of an image sensor in a movement which corresponds to the scanning movement of the focused illumination beam. A dispersive element of a predetermined dispersive effect arranged upstream of the image sensor spatially separates different spectral components of the detection beam from one another on the image sensor. A controller detects the time-variable adjustment of the scanning element, assigns the spatially separated spectral components of the detection beam to the sensor elements of the image sensor based on the detected time-variable adjustment, while taking into account the predetermined dispersive effect of the dispersive element, and individually reads out the sensor elements assigned to the spectral components.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.