Apparatus and methods for edge ring replacement, inspection and alignment using image sensors
US10665490B2 · kind B2 · utility
3Cited by
7References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 4, 2019 |
| Grant date | May 26, 2020 |
| Priority date | — |
| Expiry date | Jan 4, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68742
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A first edge ring is removed from a substrate support within a process module using a transfer robot. The transfer robot is then used to place a second edge ring on the substrate support. An image sensor (e.g., a disk-shaped wireless image sensor) is positioned over the second edge ring using the transfer robot. The image sensor generates image information, which is analyzed to determine alignment of the second edge ring.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.