Semiconductor device
US10666166B2 · kind B2 · utility
1Cited by
9References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 31, 2019 |
| Grant date | May 26, 2020 |
| Priority date | — |
| Expiry date | Jan 31, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2499/13
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present disclosure provides a semiconductor device including a fixed electrode, a movable electrode and an elastic support. The movable electrode faces the fixed electrode and is movable relative to the fixed electrode. The elastic support supports the movable electrode to be movable in an elastic direction of the elastic support. Either one of the fixed electrode or the movable electrode is an electret electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.