Capacitive pressure sensor
US10670481B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 14, 2018 |
| Grant date | Jun 2, 2020 |
| Priority date | — |
| Expiry date | Aug 23, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M3/16
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure introducing chamber is provided with a baffle plate which is positioned with one surface thereof facing in a direction orthogonal to a direction of travel of a measured medium introduced through a pressure introducing hole into the pressure introducing chamber. A first distance between a pressure receiving surface of a sensor diaphragm and an inner surface of the pressure introducing chamber facing the pressure receiving surface and a second distance between the pressure receiving surface of the sensor diaphragm and the other surface of the baffle plate facing the pressure receiving surface are both smaller than a mean free path of the measured medium in the entire region of the pressure receiving surface of the sensor diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.