Patent · US Active

Sensor element for a pressure sensor

US10670482B2 · kind B2 · utility

1Cited by

8References

13Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Stefan Zehringer · Reutlingen, DE
Zoltan Lestyan · Martonvásár, HU
Richard Fix · Gerlingen, DE
Jochen Franz · Reutlingen, DE
Michaela Mitschke · Reutlingen, DE
Tobias Sebastian Frey · Reutlingen, DE

Key dates

Filing date	Oct 14, 2016
Grant date	Jun 2, 2020
Priority date	—
Expiry date	May 5, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG01L19/0092
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A sensor element for a pressure sensor, includes a sensor membrane on which a defined number of piezoresistors are situated, the piezoresistors being configured in a circuit in such a way that, when there is a change in pressure an electrical change in voltage can be generated; at least two temperature measuring elements configured in relation to the sensor membrane in such a way that temperatures of the sensor membrane at positions of the piezoresistors can be measured using the temperature measuring elements, an electrical voltage present at the circuit of the piezoresistors due to a temperature gradient being capable of being compensated computationally using the measured temperatures.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.