Particle detecting device and method for inspecting particle detecting device
US10670513B2 · kind B2 · utility
0Cited by
1References
10Claims
0Family size
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Key dates
| Filing date | Apr 4, 2017 |
| Grant date | Jun 2, 2020 |
| Priority date | — |
| Expiry date | Apr 4, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/1006
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A particle detecting device includes an inspection light source 30, which emits inspection light, a flow cell 40, which is irradiated with the inspection light, and an oval mirror 50, which has a first focal point at a position of the flow cell 40 and has a hole 51 at an apex of the oval mirror 50.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.